FEOL CVD Films

  • PECVD Silane based Oxide 30,000Å, 24,000Å, 15,000Å, 12,000Å, 10,000Å, 5,000Å, 3,000Å, 850Å, 500Å, 300Å
  • SACVD HARP 1000Å, 3000Å, 5000Å, 7000Å
  • PECVD Nitride Compressive  300Å, 500Å            
  • Neutral   2,000Å, 700Å, 400Å, 300Å, 200Å, 30Å
  • Tensile   500Å
  • RTCVD Nitride  4,000Å, 2,000Å, 1,200Å, 1,000Å, 800Å, 700Å, 600Å, 500Å, 450Å, 400Å, 350Å, 300Å, 250Å, 200Å, 150Å, 100Å
  • Amorphous Carbon 9000Å, 7000Å, 5000Å, 3000Å, 1500Å, 700Å, 600Å

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